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MEMS & Microsystems NPTEL

Online Free Online Course by  World Mentoring Academy
Online / Free Online Course

Details

Language: English
Units: 32
Lesson content
  • Lec 1 Introduction  
  • Lec 2 Introduction  
  • Lec 3 Evoluation of MEMS, Microsensors, Market Survey  
  • Lec 4 Application of MEMS  
  • Lec 5 MEMS Materials  
  • Lec 6 MEMS Materials' Properties  
  • Lec 7 MEMS Materials Properties (Contd.)  
  • Lec 8 Microelectronic Technology for MEMS - II  
  • Lec 9 Microelectronic Technology for MEMS - III  
  • Lec 10 Micromachining Technology for MEMS  
  • Lec 11 Micromachining Process  
  • Lec 12 Etch Stop Techniques and Microstructure  
  • Lec 13 Surface and Quartz Micromachining  
  • Lec 14 Fabrication of Micromachined Microstructure  
  • Lec 15 Microstereolithography  
  • Lec 16 MEMS Microsensors Thermal  
  • Lec 17 Micromachined Microsensors Mechanical  
  • Lec 18 MEMS Pressure and Flow Sensor  
  • Lec 19 Micromachined Flow Sensors  
  • Lec 20 MEMS Inertial Sensors  
  • Lec 21 Micromachined Microaccelerometers for MEMS  
  • Lec 22 MEMS Accelerometers for Avionics  
  • Lec 23 Temperature Drift and Damping Analysis  
  • Lec 24 Piezoresistive Accelerometer Technology  
  • Lec 25 MEMS Capacitive Accelerometer  
  • Lec 26 MEMS Capacitive Accelerometer Process  
  • Lec 27 MEMS Gyro Sensor  
  • Lec 28 MEMS for Space Application  
  • Lec 29 Polymer MEMS & Carbon Nano Tubes CNT  
  • Lec 30 Wafer Bonding & Packaging of MEMS  
  • Lec 31 Interface Electronics for MEMS  
  • Lec 32 MEMS for Biomedical Applications (Bio-MEMS)
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